Study on the friction and wear performance of MoSx thin films produced by ion-beam enhanced deposition (IBED) and magnetron sputtering (MS)

Daming Zhuang,Jiajun Liu,Baoliang Zhu,Weizhi Li,Xushou Zhang,Shengrong Yang
1995-01-01
Abstract:The MoSx thin films were deposited by IBED and MS method respectively onto the surface of IBED Si3N4 and TiN thin films, and their friction and wear performances were compared with the 52100 steel-sample by using a SRV testing machine. The results show that all the MoS films exhibit good tribological behavior. The MS MoSx thin film is better in wear-resistance and the IBED MoSx film shows a longer wear life. The wear resistance of IBED Si3N4 and TiN film plus MoSx films is 3-4 times and 8-20 times that of single IBED Si3N4 and TiN films and 52100 steel respectively. The analyses indicate that the difference in friction and wear performance between the two kinds of MoSx thin films is determined by the x value of MoSx, its microstructure and atom mixing state at interface.
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