A Study of the Friction and Wear Performance of MoSx Thin Films Produced by Ion Beam Enhanced Deposition and Magnetron Sputtering

DM Zhuang,JJ Liu,BL Zhu,WZ Li
DOI: https://doi.org/10.1016/s0043-1648(97)00039-2
IF: 4.695
1997-01-01
Wear
Abstract:MoSx thin films were deposited by ion beam enhanced deposition (IBED) and magnetron sputtering (MS) onto the surface of IBEN Si3N4 and TiN thin films. The friction and wear performances of thin films and 52100 steel were compared using an SRV model reciprocating testing machine. The results showed that all MoSx films exhibit good tribological behavior. The MS MoSx thin film has better wear resistance and the IBED MoSx film has a longer wear life. The wear resistance of IBED Si3N4 and TiN thin film plus MoSx film is 3–4 times and 8–20 times that of single IBED Si3N4 and TiN thin films and 52100 steel respectively. The analyses indicate that the difference in friction and wear performance between the two kinds of MoSx thin film is determined by the x value of MoSx, its microstructure and the atom mixing effect at the interface.
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