Abstract:MoS(2) films about 1 mu m in thickness have been deposited on 9Cr18 steel substrate disc with dimension of Phi 70mmx10mm by magnetron sputtering method. The effect of high loads (15 similar to 50N) on tribological behaviors of the magnetron sputtered MoS2 films in vacuum was studied by pin-disc wear tests. The pins made with 2Cr13 steel were (1)Phi 9mmx20mm and the leading portion of them was spheric. The damage process of MoS(2) films were analyzed based on the results of SEM, XRD and nanohardness. The results show the friction coefficient (FC) and the wearing life of the MoS(2) films decrease with the increase of load when sliding velocity of 1.6m/s is faxed. The FC of the films is about 0.015 at 50N load. The wearing life of the films is the most highest at 15N which can reach 2000 meter. When the load is 30N and sliding velocity is 1.6 m/s, the damage process of the MoS(2) films can be divided into four stages. At the initial stage, the breadth of wear track increases with the elongation of sliding time and MoS(2) abrasive dust appears at the boundary of wear track due to high load. The wear track is shallow. Compared with the other positions, wearing is more serious at the center of the wear track where has some micron dimension micropores. The film appears light adhesion deformation. The boundary of wear track has many cracks and the MoS(2) film peels in pieces at the second stage. Then a steady lubricating stage starts. The boundary of wear track becomes regular, cracks disappear and abrasive dust is little at this stage. After the steady stage, MoS(2) abrasive dust and the naked area of the substrate disc at the center of wear track increase with sliding time. When MoS(2) film was damaged thoroughly, the wear test carried out between 2Cr13 pin/9Cr18 disc. The adhesion deformation becomes very serious. The XRD results show that as-deposited MoS(2) films are hexagonal structure and wearing process induces the structure change of the films. The nanohardness measurement indicates the hardness of the contact region increases firstly and then almost keeps constant. The MoS(2) films are damaged at early stage of the friction processing, but the remaining MoS(2) films can still depress adhesion between stainless steel substrates for a short period. So it can offer excellent solid lubrication property.

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