Characterization of SINTEF 3D diodes with trenched-electrode geometry before and after neutron irradiation

R. Mendicino,A. Kok,O. Koybasi,M. Povoli,A. Summanwar,G.-F. Dalla Betta,A. Summanwar and G.-F. Dalla Betta
DOI: https://doi.org/10.1088/1748-0221/15/02/C02023
2020-02-18
Journal of Instrumentation
Abstract:We report on the characterization of 3D diodes with trenched electrodes and active edges manufactured by SINTEF MiNaLab (Oslo, Norway), and irradiated with reactor neutrons up to a maximum fluence of 2 × 10 16 n eq cm −2 . The charge collection performance of these test structures is investigated by using a position resolved pulsed laser system, and discussed with the aid of TCAD simulations. In spite of the non-idealities of the test setup, whose spatial resolution is not fine enough for the small-pitch geometries of the considered samples, results confirm the good radiation hardness of 3D sensors with trenched electrodes.
instruments & instrumentation
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