Characteristics of 3D Micro-Structured Semiconductor High Efficiency Neutron Detectors

S. L. Bellinger,W. J. McNeil,T. C. Unruh,D. S. McGregor
DOI: https://doi.org/10.1109/tns.2008.2006682
IF: 1.703
2009-06-01
IEEE Transactions on Nuclear Science
Abstract:Silicon diodes with large aspect ratio perforated micro-structures backfilled with 6LiF show a dramatic increase in neutron detection efficiency beyond that of conventional thin-film coated planar devices. Described in the following are advancements in the technology with increased perforation depths. Perforated silicon diodes with three different etched micro-structure patterns were tested for neutron counting efficiency. The etched micro-structure patterns consisted of circular holes, straight trenches, and continuous sinusoidal waves, with each pattern etched 200 $\mu$m deep. Normal incident neutron counting efficiencies were determined to be 9.7%, 12.6%, and 16.2% for circular hole, straight trench, and sinusoidal devices, respectively, at a reverse bias of 3 volts. The perforated neutron detectors demonstrate limited sensitivity to high-energy photon irradiation with a 60Co gamma-ray source. This work is part of on-going research to develop solid-state semiconductor neutron detectors with high detection efficiencies and uniform angular responses.
engineering, electrical & electronic,nuclear science & technology
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