Abstract:Soft pressure sensors based on liquid metals (LMs) may find broad applications, but it is challenging to fabricate such sensors that can achieve high stress resolution without additional parts. Herein, a method named laser-induced selective adhesion transfer (LISAT) is proposed. LISAT can pattern LM by selectively changing high adhesion of the poly(dimethylsiloxane) (PDMS) surface to LM into low adhesion with the aid of rough micro/nanostructures induced by a femtosecond laser. Based on this principle, LM microchannels with controllable shapes can be obtained by LM transfer and subsequent encapsulation. Since the smallest microchannel thickness is only ∼25 μm, sensor stress resolution can reach 0.0168 kPa without any additional parts to amplify the effect of pressure. As proof-of-concept demonstrations, the sensor is used for sensing the dynamic movement of a small sphere (∼0.16 g) and even an ant (∼0.025 g). LISAT provides a versatile platform for fabricating high-stress-resolution LM pressure sensors with controllable patterns and device structures to adapt to different application scenarios.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsami.0c16250?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsami.0c16250</a>.Softness and stability tests of electronics device fabricated by LISAT, reproducibility of LISAT, LM pattern lateral resolution, optical image of calibrating the LM pressure sensor, detailed measurements of elastic modulus and Poisson ratio, simulation of the deformation of an LM microchannel, hysteresis of the pressure sensor, and theoretical curve of Δ<i>R</i> and <i>w</i> (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c16250/suppl_file/am0c16250_si_001.pdf">PDF</a>)Video showing the real-time changes of the overall resistance when a glass marble (∼0.16 g) passes through the pressure sensor driven by horizontal air flow (Video S1) (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c16250/suppl_file/am0c16250_si_002.mp4">MP4</a>)Video showing two rounds of the real-time resistance changes when an ant (∼0.025 g) passes through the pressure sensor (Video S2) (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c16250/suppl_file/am0c16250_si_003.mp4">MP4</a>)This article has not yet been cited by other publications.

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