Non-uniform distribution of induced strain in a gate-recessed AlGaN/GaN structure evaluated by micro-PL measurements

M Mikulics,H Hardtdegen,D Gregušová,Z Sofer,P Šimek,St Trellenkamp,D Grützmacher,H Lüth,P Kordoš,M Marso
DOI: https://doi.org/10.1088/0268-1242/27/10/105008
IF: 2.048
2012-08-01
Semiconductor Science and Technology
Abstract:Micro-photoluminescence (µ-PL) studies were performed on AlGaN/GaN heterostructure field effect transistors (HFETs) with different gate-recessing depths. It was found that µ-PL is the method of choice for detecting dry etching damage and simultaneously recording strain and stress in the HFET GaN layer. Lateral sub-µm resolved mapping shows that the strain in the GaN layer after recessing is partially relaxed and non-uniform.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter
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