Abstract:We have developed an automated setup for simultaneous measurement of Seebeck coefficient S(T) and electrical resistivity ρ(T) of thin film samples from room temperature to ∼650 °C. S and ρ are extracted from current-voltage (I-V) measurements obtained using a semiconductor parameter analyzer and temperature measurements obtained using commercial thermocouples. The slope and the x-axis intercept of the I-V characteristics represent the sample conductance G and the Seebeck voltage, respectively. The measured G(T) can be scaled to ρ(T) by the geometry factor obtained from the room temperature resistivity measurement of the film. The setup uses resistive or inductive heating to control the temperature and temperature gradient on the sample. Inductive heating is achieved with steel plates that surround the test area and a water cooled copper pipe coil underneath that generates an AC magnetic field. The measurements can be performed using resistive heating only or inductive heating only, or a combination of both depending on the desired heating ranges. Inductive heating provides a more uniform heating of the test area, does not require contacts to the sample holder, can be used up to the Curie temperature of the particular magnetic material, and the temperature gradients can be adjusted by the relative positions of the coil and sample. Example results obtained for low doped single-crystal silicon with inductive heating only and with resistive heating only are presented.

1 000 000 °C/s thin film electrical heater: In situ resistivity measurements of Al and Ti/Si thin films during ultra rapid thermal annealing

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High temperature setup for measurements of Seebeck coefficient and electrical resistivity of thin films using inductive heating

Thermal Conductivity Measurements of Ultra-Thin Single Crystal Silicon Films Using Improved Structure

High-Temperature Thermoelectric Characterization of III – V Semiconductor Thin Films by Oxide Bonding

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In situ transmission-electron-microscopy investigation of melting in submicron Al-Si alloy particles under electron-beam irradiation

Kinetics of SS-Phase Transformation in the Heat Treatment of FeSi2- and Fe2Si5-based Thermoelectric Alloys

A Rapid And Controllable Acoustothermal Microheater Using Thin Film Surface Acoustic Waves

Controlling the Electrical Properties of Undoped and Ta-doped TiO2 Polycrystalline Films via Ultra-Fast Annealing Treatments

The effect of different annealing cooling rate on electrical and mechanical properties of TiO2 thin films

An In-Situ TEM Investigation on Microstructure Evolution of Ni-25 At.% Al Thin Films

Fabrication and performances of high-temperature transient response ITO/In2O3 thin-film thermocouples

Specific Heat Determination of Metallic Thin Films at Room Conditions

Hot zone electrical resistance measurement for health monitoring of SiC and Si-based materials

Characterization upon electrical hysteresis and thermal diffusion of TiAl 3 O x dielectric film

On-Chip Modification of Titanium Electrothermal Characteristics by Joule Heating: Application to Terahertz Microbolometer