Abstract:To meet the test requirements for the surface temperature parameters of next-generation ceramic matrix composite equipment components, this study designed and fabricated an all-ceramic material high-tem-perature test sensor, including a substrate, sensitive layer, and protective layer. The sensor was prepared using the thick-thin film integration process. The ITO-In2O3 thick film thermocouple was prepared on ceramic substrate using screen printing technology, and the Al2O3 thin film protective layer was prepared by pulsed laser ablation and the sol-gel method. Scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) were used to study the microstructure, phase, surface element composition and chemical transition state of the prepared thermocouple. The results show that the sintered thermocouple has a compact structure and good electrical conductivity. Static and dynamic test platforms were built to test the performance of thermocouple, and test results show that the prepared thermocouple has good repeatability and stability in the temperature range of 25-1300 degrees C. The average Seebeck coefficient reached 129.80 mu V/degrees C. In the thermoelectric stability evaluation experiment (1300 degrees C for 8 h), the peak output voltage was 153.2 mV. The limit test temperature of the thermocouple reached 1500 degrees C. When the temperature difference was 1382 degrees C, the peak output voltage was 169.974 mV. The dynamic properties of the sensor were studied using pulsed laser heating, and the results showed that the dynamic response time constant of the thermocouple was 3.52 ms.(c) 2022 Elsevier B.V. All rights reserved.

Fabrication and performances of high-temperature transient response ITO/In2O3 thin-film thermocouples

Ito Thin Film Resistance Temperature Detector with Al/Al2O3 Protective Coating for High-Temperature Application

Preparation and Thermal Volatility Characteristics of In2O3/ITO Thin Film Thermocouple by RF Magnetron Sputtering

Design and performance evaluation of an all-ceramic high-temperature test sensor

Enhanced Stability of ITO/In2O3 Thin Film Thermocouples by Coating Al2O3 Layer

ITO Film Prepared by Ion Beam Sputtering and Its Application in High-Temperature Thermocouple

Nano Cone ITO Thin Films Prepared by Pulsed Laser Deposition for Surface Measurement of High-Temperature Components

High Temperature Thin Film Thermocouples on Different Ceramic Substrates

Thermoelectrical Properties of ITO/Pt, In2O3/Pt and ITO/In2O3 Thermocouples Prepared with Magnetron Sputtering

Microstructure and thermoelectric properties of In2O3/ITO thin film thermocouples with Al2O3 protecting layer

Ito Thin Film Thermocouple For Transient High Temperature Measurement In Scramjet Combustor

Fabrication and Characterization of La0.8Sr0.2CrO3/In2O3 Thin Film Thermocouple for High Temperature Sensing

A Highly Thermostable In2O3/ITO Thin Film Thermocouple Prepared via Screen Printing for High Temperature Measurements

Preparation and Thermoelectric Characteristics of ITO/PtRh:PtRh Thin Film Thermocouple

Preparation and Thermoelectric Characteristics of ITO/Pt Thin Film Thermocouples on Ni-based Superalloy Substrate

Indium Tin Oxide Thin-Film Thermocouple Probe Based On Sapphire Microrod

Fabrication and Characterization of La0.8Sr0.2CrO3-ITO Thermocouples for High-Temperature Sensing

Fabrication of Pt/ITO Thin-Film Thermocouple on Metal Substrates

WRe26-In2O3 probe-type thin film thermocouples applied to high temperature measurement.

Fabrication and performance study of high temperature thin film sensor

Design and Fabrication of Thermocouple Sensors Based on a Ceramic Curved Alumina Substrate