Abstract:This work considers the resulting material structural effects of laser-processing chemical vapor deposited (CVD) diamond. The utilized 532 nm wavelength laser had a pulse duration of 40 ns together with a spot diameter of ca. 40 μm. The effect of cutting fluence on the CVD diamond microstructure was investigated using both Raman and transmission electron microscopy (TEM) analyses. While Raman analysis showed that increasing the laser fluence led to a transition from diamond to graphite, the spread of the beam and consequent interrogation volume leads to limitations in understanding the precise structure over the ablated diamond surface. As such, TEM showed that at a low fluence (4.9 J/cm2), the subsurface microstructure is a mix of both graphite and amorphous carbon (aC). At 15 J/cm2, only the graphite phase was identified. As the fluence increases further, the thickness of the graphite layer decreases until it disappears at a fluence of 50 J/cm2. In contrast, a crystalline diamond phase began to be identified at 15 J/cm2 and grows with increasing fluence. Moreover, cracks were visible only until a fluence of 15 J/cm2, while at higher fluences, no cracks were observed. A simulation model was developed to predict the residual graphitization thickness formed in CVD diamond by a laser beam. Despite some differences in the graphite layer thickness, the results obtained from the model were consistent with the TEM results, supporting the findings of this study. Finally, cracks were only located in the graphite phase at the two lowest laser fluences. This was due to the low fracture toughness of graphite as compared to diamond.

Enhanced etch rate of deep-UV laser induced etching of diamond in low pressure conditions

Precision sub-monolayer manipulation of diamond surface chemistry using laser direct write oxidation in air

Controllable Diamond Cutting of Structured Surfaces with Subnanometric Height Features on Silicon

Deterministic Nanopatterning of Diamond Using Electron Beams.

Diamond etching with near-zero micromasking

Role of oxygen in laser-induced contamination at diamond-vacuum interfaces

Role of Oxygen in Laser Induced Contamination at Diamond-Vacuum Interfaces

Atomic Scale Etching of Diamond: Insights from Molecular Dynamics Simulations

Patterning of diamond with 10 nm resolution by electron-beam-induced etching

Growth of highly oriented graphite by ultraviolet nanosecond pulsed laser ablation of monocrystalline diamond

Optical Quality Laser Polishing of CVD Diamond by UV Pulsed Laser Irradiation

Diamond Optical Vortex Generator Processed by Ultraviolet Femtosecond Laser.

Enhanced optical properties of chemical vapor deposited single crystal diamond by low-pressure/high-temperature annealing

High-precision and high-speed etching of diamond surfaces using Fe–Ni alloy catalyzed H–O plasma etching

Enhanced Growth Of High Quality Single Crystal Diamond By Microwave Plasma Assisted Chemical Vapor Deposition At High Gas Pressures

Photochemical modification of a diamond surface using a pulsed UV laser as the energy source

Study of spray-mist-assisted laser processing of micro-structures on CVD diamond surface

Ablation Threshold Measurement and Chemical Modification of UV Nanosecond Laser Micromachining of Polycrystalline Diamond

Quality assessment of in situ plasma etched diamond surfaces for CVD overgrowth

[Optical Spectroscopy for High-Pressure Microwave Plasma Chemical Vapor Deposition of Diamond Films]

Nanosecond pulsed laser-processing of CVD diamond