Novel Symmetric Vertical-Channel Ni-Salicided Poly-Si Thin-Film Transistors With High on/off-Current Ratio

Yi-Hong Wu,Po-Yi Kuo,Yi-Hsien Lu,Yi-Hsuan Chen,Tien-Sheng Chao
DOI: https://doi.org/10.1109/led.2010.2061215
IF: 4.8157
2010-11-01
IEEE Electron Device Letters
Abstract:We have successfully fabricated the symmetric vertical-channel Ni-salicided polycrystalline silicon thin-film transistors (VSA-TFTs) for the first time. The transfer characteristics of VSA-TFTs show a sharp turning between subthreshold and on state. The off -state currents can be improved by a modified overetching of oxide, equivalent dual-gate structure, and $\hbox{n}^{+}$ floating-region length. The on-state currents can be enhanced by Ni-salicidation. The VSA-TFTs display a good subthreshold swing of 220 mV/dec, steep mobility increase (field-effect mobility of 76 $\hbox{cm}^{2}/\hbox{V}\cdot\hbox{s}$), and large on/off-current ratio of more than $\hbox{10}^{9}\ (I_{\rm OFF}\! = \hbox{4}\! \times\! \hbox{10}^{-14},\ I_{\rm ON} =\! \hbox{7}\! \times\! \hbox{10}^{-5},\ \hbox{and}\ W_{\rm mask}/L_{\rm mask}\! =\break \hbox{10}\ \mu \hbox{m}/\hbox{3}\ \mu\hbox{m})$.
engineering, electrical & electronic
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