Modified Preston Equation- Revisited

S Ramarajan,S.V. Babu
DOI: https://doi.org/10.1557/proc-566-149
1999-01-01
MRS Proceedings
Abstract:The effect of pressure and velocity on the polish rates of copper was determined in DI water and in the presence of ferric nitrate, H 2 0 2 /glycine, and NH 4 OH with alumina particles as the abrasives. The polish rate shows a stronger dependence on velocity than that predicted by the Preston equation in the case of ferric nitrate, a highly reactive chemical. The velocity dependence is weaker for the other two less reactive chemicals, and is the same as that predicted by Preston equation for DI water. Our earlier empirical model, R = KPV + BV + Rc, where K, B, and R c are constants, describes all the polish rate data satisfactorily.
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