Abstract:Abstract To enable accurate characterization of the mechanical behavior of materials at the micro-scale, e.g., in micro-systems, experiments are required that are representative of the actual (often multi-axial) loading conditions to which these materials are subjected during fabrication and operation. Equally important is the acquisition of mechanical data in the form of multi-axial force measurements, and the measurement of kinematics by in-situ microscopic techniques. To this end, a micro-mechanical testing rig is here realized using commercially available piezoelectric actuators. It is shown that the setup measures forces with a resolution of $\sim 0.3$ ∼ 0.3 [mN] in the x - and y -directions, and $\sim 50$ ∼ 50 [mN] in the z -direction, over a range of 5 [N], yielding a high dynamic (force) range. Furthermore, displacements can be imposed with a resolution of $\sim 1$ ∼ 1 [nm] over a range of 200 [ μ m], in all three directions ( x , y , z ). The setup is compact, vacuum compatible, and specimens are loaded on top of the setup so that the field of view is unobstructed, allowing for in-situ testing with optical and scanning electron microscopy, and optical profilometry. A generic method is developed for extracting quasi-static forces from the piezoelectric actuators. Furthermore, challenges raised from the use of commercial actuators, for which the public technical specifications are generally incomplete, are overcome and the solution strategy is described. Proof-of-concept experiments on flexible, organic, light-emitting diodes demonstrate the potential of the setup to provide rich micro-mechanical data in the form of tri-axial force and displacement measurements. The commercial availability of the piezoelectric actuators, combined with the proposed engineering solutions lead to a generally accessible micro-mechanical test setup to investigate small-scale specimens under realistic, multi-axial loading conditions.

Calibration of piezoelectric positioning actuators using a reference voltage-to-displacement transducer based on quartz tuning forks

Calibration of the oscillation amplitude of quartz tuning fork-based force sensors with astigmatic displacement microscopy

Calibration Of Non-Linearity Of Piezo Elements And Image Distortion In Atomic Force Microscope

Force-distance studies with piezoelectric tuning forks below 4.2 K

Fractionized Calibration of the Sample Stage Used in an AFM-probe Mechanical Testing System

Closed-loop Displacement Control System for Piezoelectric Transducer Based on Optical Frequency Comb

Resetting Piezoresponse Force Microscopy: Towards a real quantitative technique

Calibration of Displacement Sensors with High-Precision and Large Measurement Range Using Temporal Speckle Pattern Interferometry

Quantitative Measurements of Shear Displacement Using Atomic Force Microscopy

Design Of A Piezoelectric Exciter Actuator For Micro-Displacement Control - Theory And Experiment

Calibration of oscillation amplitude in Dynamic Scanning Force Microscopy

A Novel Inertial Micro-Actuator and Its Application in Positioning Mechanism

Accurate 3D Nanoscale Electromechanical Imaging with a Metrological Atomic Force Microscope

Note: an in Situ Method for Measuring the Non-Linear Response of a Fabry-Perot Cavity.

Creep and Hysteresis Compensation for Nanomanipulation Using Atomic Force Microscope

Development of a Novel Strategy Based on In-Process Compensation of Charge Leakage for Static Force Measurement by Piezoelectric Force Sensors

Study of piezo-induced surface vibration in solids using atomic force probe

Flexural Resonance Vibrations of Piezoelectric Ceramic Tubes in Besocke-Style Scanners

An In-Situ, Micro-Mechanical Setup with Accurate, Tri-Axial, Piezoelectric Force Sensing and Positioning

A Displacement Sensor Combining Cavity Tuning of A Laser with A Piezoelectric Transducer'S Subdivision Technique for A Bidirectional Sampling on the Rising and Falling Flanks

Statically Stable Charge Sensing Method for Precise Displacement Estimation of Piezoelectric Stack-Based Nanopositioning