Enhanced Performance of Vertical $\beta $ -Ga $_{\text{2}}$ O $_{\text{3}}$ Schottky Barrier Diodes Through 212-Mev Low-Fluence Ge Ion Irradiation

Junzheng Gao,Yun Li,Weihao Lin,Zhimei Yang,Min Gong,Mingmin Huang,Yao Ma
DOI: https://doi.org/10.1109/ted.2024.3481201
IF: 3.1
2024-01-01
IEEE Transactions on Electron Devices
Abstract:The effects of 212-MeV Ge ion irradiation on the electrical performance of the vertical beta-Ga2O3 Schottky barrier diode (SBD) devices have been investigated in this work. With a fluence of 1x108ions/cm(2), it is found that the electrical performance of the vertical beta-Ga2O3SBD is significantly changed, including a decrease in the effective carrier concentration (ND) from 8.82x1015to2.64x1015cm(-3), a reduction in reverse current density(JR) from 1.39x10-6to 1.17x10-7A/cm(2), a restoration of the forward current density (JF) and series resistance(RS), and an increase in the reverse breakdown voltage (BV)from 218 to 420 V. Deep-level transient spectroscopy (DLTS)analysis reveals a decrease in the asymmetric defect peakatEC-0.78 eV in the virgin sample, accompanied by the appearance of theEC-0.84 eV defect peak in the irradiated sample. This indicates that Ge ion irradiation can mod-ify the arrangement of defect levels and interface states(NSS), consequently leading to reshaping the distribution of asymmetric defect peaks. Additionally, technology computer-aided design (TCAD) simulations demonstrate that the weakening of the metal-semiconductor (M-S)interface state, enhanced mobility, and the presence of deep-level defects in the bulk material together contribute to alter the electrical properties of the device postirradiation. Therefore, the low-fluence Ge ion irradiation can optimize the Au/Ni/ beta-Ga2O3 interface and improve the electrical performance of the vertical beta-Ga2O3SBD
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