Hot Wall Epitaxial Growth of ZnSe on S-passivated GaAs (100) Substrate

Wangfeng Cai,Z.S. Li,Xinyi Ding,X. Y. Hou,J. Wang,Chunqin Zhu,Runzhou Su,Xun Wang
DOI: https://doi.org/10.1016/0022-0248(94)90352-2
IF: 1.8
1994-01-01
Journal of Crystal Growth
Abstract:A new sulfur passivation technique for GaAs surface by using S 2 Cl 2 has been developed as the substrate treatment method in heteroepitaxial growth of ZnSe films. A clean surface can be achieved by annealing the as-treated sample in vacuum at 600°C. ZnSe thin films grown by hot wall epitaxy on S 2 Cl 2 passivated GaAs show improved crystalline quality compared with those treated by conventional method, as indicated by Raman scattering measurements.
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