Abstract:Fused silica is widely used in aerospace and precision integrated micro-optical sensors due to its high hardness, low coefficient of thermal expansion, high transmittance properties and high chemical stability in harsh environments. Due to the amorphous characteristics, fused silica wet etching is isotropic and cannot realize specific structural functional devices; dry etching process is complex, costly, and relatively low productivity. These characteristics make the processing of fused silica extremely difficult, with high cost and low yield. Femtosecond laser processing has been widely used in the processing of complex and fine three-dimensional structure of fused silica due to its wide adaptability of materials, high degree of processing fineness and non-mask processing technology, but the surface of the processed surface is relatively rough. Fine micro-optical devices can be realized by wet-assisted femtosecond laser processing. In this study, microstructural patterns were fabricated on fused silica using a tightly focused femtosecond laser by means of a self-developed ultrafast laser processing instrumentation. By controlling the laser processing parameters and the etching time of HF solution to realize the precise modulation of linewidth, period and height of the grating, one/two dimensional gratings, and the Fresnel zone plates with circular and elliptical focal points and the biomimetic compound eye microlens array were successfully fabricated. Finally, the performance of the fabricated optical components were characterized, which were comparable to theoretical simulation values. The results show that the total diffraction efficiency of the fused silica gratings fabricated using this method reaches 85.5%; the Fresnel zone plates and the bionic compound eye microlens array have good focusing effects. This study provides a reference method for the fine micromachining of hard materials such as fused silica, and provides a theoretical basis for its engineering application.

Research of Femtosecond Laser-Assisted Etching of Fused Silica Micro-Optics Devices

Traceless Mitigation of Laser Damage Precursors on a Fused Silica Surface by Combining Reactive Ion Beam Etching with Dynamic Chemical Etching

Investigation on Femtosecond Laser-Assisted Microfabrication in Silica Glasses

Femtosecond laser modification combined with chemical etching to achieve high-quality cutting of millimeter-thick fused silica

Rapid CO2 Laser Processing Technique for Fabrication of Micro-Optics and Micro-Structures on Fused Silica Materials

Fabrication of High Refractive Index-Modulation Structures in Fused Silica by Femtosecond Laser Pulses

Micro-nano fabrication of femtosecond laser wet etch

Fabrication of beam shapers in the bulk of fused silica by femtosecond laser pulses.

Research on Laser-Assisted Micro-Milling of Fused Silica

Controllable Preparation of Fused Silica Micro Lens Array through Femtosecond Laser Penetration-Induced Modification Assisted Wet Etching

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Scan Speed and Fluence Effects in Femtosecond Laser Induced Micro/nano-Structures on the Surface of Fused Silica

Advances in fabrication of micro-optical components by femtosecond laser with etching technology

Repair of Fused Silica Damage Using Selective Femtosecond Laser-Induced Etching

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Liquid-Assisted Femtosecond Laser Precision-Machining of Silica.

Study on the Absorption Characteristics and Laser Damage Properties of Fused Silica Optics under Flexible Polishing and Shallow DCE Process

New Progress of CO2 Laser Processing Techniquesfor Fused Silica Optics

Experimental Investigation on Processing of Fused Silica Microchannels by High Repetition Rate Femtosecond Laser

Morphological Investigation at the Front and Rear Surfaces of Fused Silica Processed with Femtosecond Laser Pulses in Air.

Effects of Thermal Annealing on Femtosecond Laser Micromachined Glass Surfaces