Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Advances in fabrication of micro-optical components by femtosecond laser with etching technology

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Application of Micro-Optical Components Fabricated with Femtosecond Laser

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Femtosecond Laser Fabrication of Refractive/Diffractive Micro‐Optical Components on Hard Brittle Materials

Micro-Fabrication By Femtosecond Laser Pulses

Femtosecond laser micromachining optical devices

Ultra-smooth micro-optical components of various geometries.

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Research of Femtosecond Laser-Assisted Etching of Fused Silica Micro-Optics Devices

Fabrication of Infrared Micro-Optical Components Using Femtosecond Laser

Fabrication of micro-optical components by using a femtosecond laser

Femtosecond Laser Micro/nano Processing: From Fundamental to Applications

Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses

Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials

Micro-nano fabrication of femtosecond laser wet etch

Etching-assisted femtosecond laser modification of hard materials

Silicon Three-Dimensional Structures Fabricated by Femtosecond Laser Modification with Dry Etching

Recent progress on femtosecond laser micro-/nano-fabrication of functional photonic structures in dielectric crystals: A brief review and perspective

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics