Abstract:By virtue of its narrow pulse width and high peak power, the femtosecond pulsed laser can achieve high-precision material modification, material additive or subtractive, and other forms of processing. With additional good material adaptability and process compatibility, femtosecond laser-induced application has achieved significant progress in flexible electronics in recent years. These advancements in the femtosecond laser fabrication of flexible electronic devices are comprehensively summarized here. This review first briefly introduces the physical mechanism and characteristics of the femtosecond laser fabrication of various electronic microdevices. It then focuses on effective methods of improving processing efficiency, resolution, and size. It further highlights the typical progress of applications, including flexible energy storage devices, nanogenerators, flexible sensors, and detectors, etc. Finally, it discusses the development tendency of ultrashort pulse laser processing. This review should facilitate the precision manufacturing of flexible electronics using a femtosecond laser.
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
What problem does this paper attempt to address?
The problem that this paper attempts to solve is: how to use femtosecond laser direct - writing technology to achieve high - precision and high - efficiency micro - and nano - processing in the manufacturing of flexible electronic devices. Specifically, the paper summarizes the application progress of femtosecond lasers in the processing of flexible electronic devices in recent years, including aspects such as physical mechanisms, characteristics, processing methods, and typical applications. The paper also discusses effective methods for improving processing efficiency, resolution, and size, and introduces typical progress in femtosecond laser processing in fields such as flexible energy - storage devices, nanogenerators, flexible sensors, and detectors. Finally, the paper explores the development trends and challenges faced by ultrashort - pulse laser processing.
### Overview of the main content of the paper:
1. **Introduction**:
- Introduces the background of the demand for micro - and nano - device manufacturing, as well as the advantages of femtosecond laser technology in terms of high precision, flexibility, mask - less processing, and multi - material processing.
- Emphasizes the importance of femtosecond lasers in the development of flexible electronic devices such as flexible supercapacitors, triboelectric nanogenerators, pressure/stress sensors, and photodetectors.
2. **Physical mechanisms and characteristics of femtosecond laser processing**:
- Describes in detail the multi - time - scale and multi - space - scale processes of the interaction between femtosecond lasers and materials, including photon energy absorption, electron excitation, thermal diffusion, electron - lattice energy exchange, surface electron emission, ionization, plasma generation, and expansion.
- Compares the differences between long - pulse and femtosecond - pulse laser processing, especially the characteristics of cold processing, material adaptability, and high - resolution processing.
3. **Femtosecond laser processing methods**:
- Introduces femtosecond laser direct - writing technology (FsLDW) and its applications in point, line, and layer processing.
- Discusses the application of space - time pulse - shaping techniques (such as multi - focus parallel processing, planar exposure processing, etc.) in improving processing precision and efficiency.
4. **Applications in flexible electronic devices**:
- Reviews in detail the application examples of femtosecond laser processing in fields such as flexible energy - storage devices, triboelectric nanogenerators, flexible sensors, and detectors.
- Analyzes the specific technical details and performance characteristics of these applications.
5. **Future prospects**:
- Discusses the challenges faced by femtosecond laser processing in the manufacturing of flexible electronic devices, such as material adaptability, processing efficiency, and cost control.
- Explores future development directions and the possibility of technological improvement.
Through these contents, the paper aims to provide a theoretical basis and technical guidance for the precision manufacturing of flexible electronic devices and promote the further development of femtosecond laser processing technology in this field.