Abstract:Fused silica is widely used in aerospace and precision integrated micro-optical sensors due to its high hardness, low coefficient of thermal expansion, high transmittance properties and high chemical stability in harsh environments. Due to the amorphous characteristics, fused silica wet etching is isotropic and cannot realize specific structural functional devices; dry etching process is complex, costly, and relatively low productivity. These characteristics make the processing of fused silica extremely difficult, with high cost and low yield. Femtosecond laser processing has been widely used in the processing of complex and fine three-dimensional structure of fused silica due to its wide adaptability of materials, high degree of processing fineness and non-mask processing technology, but the surface of the processed surface is relatively rough. Fine micro-optical devices can be realized by wet-assisted femtosecond laser processing. In this study, microstructural patterns were fabricated on fused silica using a tightly focused femtosecond laser by means of a self-developed ultrafast laser processing instrumentation. By controlling the laser processing parameters and the etching time of HF solution to realize the precise modulation of linewidth, period and height of the grating, one/two dimensional gratings, and the Fresnel zone plates with circular and elliptical focal points and the biomimetic compound eye microlens array were successfully fabricated. Finally, the performance of the fabricated optical components were characterized, which were comparable to theoretical simulation values. The results show that the total diffraction efficiency of the fused silica gratings fabricated using this method reaches 85.5%; the Fresnel zone plates and the bionic compound eye microlens array have good focusing effects. This study provides a reference method for the fine micromachining of hard materials such as fused silica, and provides a theoretical basis for its engineering application.

New Progress of CO2 Laser Processing Techniquesfor Fused Silica Optics

Material migration and damage characteristics of fused silica optical surface treated by CO 2 laser/short – pulse ultraviolet laser

Formation Mechanism of Surface Morphology in the Process of CO2 Pulsed Laser Processing of Fused Silica Optics

Rapid CO2 Laser Processing Technique for Fabrication of Micro-Optics and Micro-Structures on Fused Silica Materials

Formation Mechanism of a Smooth, Defect-Free Surface of Fused Silica Optics Using Rapid CO2 Laser Polishing

Investigation on the influence of the CO2 laser parameters on the defect healing process of fused silica

Toward Little Heat-Affected Area of Fused Silica Materials Using Short Pulse and High Power CO2 Laser

Research Development of CO2 Laser Treatment for Repair Damage in Fused Silica

Morphology evolution mechanisms and localized structural modification of repaired sites on fused silica optics processed by CO2 laser rapid ablation mitigation

Study on the Absorption Characteristics and Laser Damage Properties of Fused Silica Optics under Flexible Polishing and Shallow DCE Process

Evolution of Intrinsic Defects and Ring Structures on the Surface of Fused Silica Optics after CO2 Laser Conditioning.

Development of Damage Growth Mitigation in Fused Silica by CO2 Laser

Study on 532nm and CO2 laser processing of fused silica glass

Combined Studies of Surface Evolution and Crack Healing for the Suppression of Negative Factors During CO2 Laser Repairing of Fused Silica

Experimental and Theoretical Investigation of Localized CO2 Laser Interaction with Fused Silica During the Process of Surface Damage Mitigation

Research on Laser-Induced Damage Post-Restoration Morphology of Fused Silica and Optimization of Patterned CO2 Laser Repair Strategy

Coupled Thermal-Mechanical Analysis of CO<sub>2</sub> Laser Irradiation on Fused Silica

Experimental investigation and numerical simulation of defect elimination by CO2 laser raster scanning on fused silica

Microsecond-pulsed CO2 laser cleaning of high damage threshold fused silica

Research of Femtosecond Laser-Assisted Etching of Fused Silica Micro-Optics Devices

Localized Co2 Laser Treatment and Post-Heating Process to Reduce the Growth Coefficient of Fused Silica Surface Damage