Abstract:The ablation threshold, depth and crater shape of fused silica for femtosecond laser processing are investigated theoretically and experimentally. Based on tracking the spatiotemporal distribution of the free electron density, free electron temperature, and laser intensity, the electron dynamics as well as the transient optical and thermophysical properties of femtosecond laser irradiated fused silica are quantitatively determined. The numerical model is validated by comparing the calculated threshold fluence, depth and crater shape of ablation with the experimentally measured ones at a wavelength of 800 nm. The free electron relaxation time at different laser fluences and pulse durations throughout the photoionization process and impact ionization process are probed. In the present work, the findings are as follows. 1) The electron relaxation time significantly affects the material optical properties and femtosecond laser energy absorption. The optical properties change dramatically. The fused silica becomes opaque for the case of laser irradiation with fluence higher than the ablation threshold. Moreover, the transition from electron-phonon collision to electron-ion collision accompanies with the femtosecond laser ablation of fused silica. 2) By using the proposed model, the experimentally observed saturation of ablation depth at high laser fluence is elucidated by the significant change of optical reflectivity and absorption coefficient. Both the results of theoretical simulation and experimental observation indicate that laser fluence has a strong influence on the shape of the ablation crater. The ablation volume increases sharply with the increase of laser fluence for femtosecond laser irradiation, compared with that for picosecond laser irradiation. 3) With the increase of femtosecond laser fluence, the ablation depth removal efficiency and ablation efficiency are both saturated, followed by slight decrements. The peak of ablation depth removal efficiency peak occurs at the femtosecond laser fluence close to 1.4 times of the ablation threshold. While the accuracy is slightly low due to the higher sensitivity of the ablation characteristics (ablation crater depth and ablation volume) to the shorter femtosecond laser pulse. For the femtosecond laser fluence higher than 3.5 times of the ablation threshold, good repeatability over a very wide fluence range can achieve accurate processing results, because a more consistent flat-bottom ablation profile tends to appear. However, the heat-affected zone leads the processing quality to degrade, compared with the scenario of femtosecond laser fluence close to the ablation threshold.

Toward Little Heat-Affected Area of Fused Silica Materials Using Short Pulse and High Power CO2 Laser

Physical Mechanism of Pulsed Laser Interaction with Fused Silica Optics During CO2 Laser Mitigation Process

Theoretical and experimental investigations in thermo-mechanical properties of fused silica with pulsed CO2 laser ablation

Morphology evolution mechanisms and localized structural modification of repaired sites on fused silica optics processed by CO2 laser rapid ablation mitigation

Heat accumulation effect during CO2 laser processing of fused silica optics

Coupled Thermal-Mechanical Analysis of CO<sub>2</sub> Laser Irradiation on Fused Silica

Experimental and Theoretical Investigation of Localized CO2 Laser Interaction with Fused Silica During the Process of Surface Damage Mitigation

Role of Fictive Temperature Distribution Involved in CO2 Laser Polishing of Fused Silica and Its Optimization for Achieving Even Heat-Affected Zones

Formation Mechanism of Surface Morphology in the Process of CO2 Pulsed Laser Processing of Fused Silica Optics

New Progress of CO2 Laser Processing Techniquesfor Fused Silica Optics

Theoretical and Experimental Investigations of Localized CO2 Laser-Fused Silica Interactions and Thermo-Mechanical Properties of Mitigated Sites

Investigation on the influence of the CO2 laser parameters on the defect healing process of fused silica

Numerical and Experimental Investigation of Morphological Modification on Fused Silica Using CO2 Laser Ablation

Rapid CO2 Laser Processing Technique for Fabrication of Micro-Optics and Micro-Structures on Fused Silica Materials

Spatiotemporal Probe into the Femtosecond Laser Processing of Fused Silica

Material migration and damage characteristics of fused silica optical surface treated by CO 2 laser/short – pulse ultraviolet laser

Modeling of Surface Damage Mitigation in Fused Silica with Carbon Dioxide Laser

Theoretical and Experimental Research of Femtosecond Laser Processing Fused Silica

Combined Studies of Surface Evolution and Crack Healing for the Suppression of Negative Factors During CO2 Laser Repairing of Fused Silica

Research on Laser-Assisted Micro-Milling of Fused Silica

Mechanisms In Fs-Laser Ablation In Fused Silica