Abstract: The singlemode condition is one of the most important design rules for optical waveguides in guided-wave optics. The reason following the singlemode condition is that higher-order modes might be excited and thus introduce some undesired mode-mismatching loss as well as inter-mode crosstalk when light propagates along an optical waveguide beyond the singlemode regime. As a result, multimode photonic waveguides are usually not allowed. In this paper, we propose the concept of silicon photonics beyond the singlemode regime, developed with low-loss and low-crosstalk light propagation in multimode photonic waveguides with broadened silicon cores. In particular, silicon photonic waveguides with a broadened core region have shown an ultra-low-loss of ~0.1 dB/cm for the fundamental mode even without any special fabrication process. A micro-racetrack resonator fabricated with standard 220-nm-SOI MPW-foundry processes shows a record intrinsic Q-factor as high as 1.02*107 for the first time, corresponding to ultra-low waveguide propagation loss of only 0.065 dB/cm. A high-performance microwave photonic filter on silicon is then realized with an ultra-narrow 3-dB bandwidth of 20.6 MHz as well as a tuning range of ~20 GHz for the first time. An on-chip 100-cm-long delayline is also demonstrated by using the present broadened SOI photonic waveguides with compact Euler-curve bends, the measured propagation loss is ~0.14 dB/cm. The proposed concept of silicon photonics beyond the singlemode regime helps solve the issue of high propagation loss and also significantly reduces the random phase errors of light due to the random variations of waveguide dimensions. In particularity it enables silicon photonic devices with enhanced performances, which paves the way for new-generation silicon photonics realizing the large-scale photonic integration.

Low-loss Silicon Nitride Waveguides and High-Q Microring Resonators at 2-Μm Wavelength

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

Ultralow-Loss Silicon Photonics beyond the Singlemode Regime

Characterization and Optimal Design of Silicon-Rich Nitride Nonlinear Waveguides for 2 Μm Wavelength Band

Low-loss silicon waveguide and an ultrahigh-Q silicon microring resonator in the 2?μm wave band

Silicon Nitride Waveguiding for Prospective Technologies at the 2 μm Waveband

Ultralow-loss tightly confining Si3N4 waveguides and high-Q microresonators

300-Nm-thick, Ultralow-Loss Silicon Nitride Photonic Integrated Circuits by 8-In. Foundry Production

Low-Loss Silicon Platform for Broadband Mid-Infrared Photonics

Passive Devices at 2 Μm Wavelength on 200 Mm CMOS-compatible Silicon Photonics Platform [Invited]

New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

Mid-infrared Nonlinear Silicon Hybrid Waveguide with High Figure of Merit

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Wafer-Scale Demonstration of Low-Loss (~0.43 dB/cm), High-Bandwidth (> 38 GHz), Silicon Photonics Platform Operating at the C-Band

Ultra-low loss waveguide platform in silicon photonics

New-generation silicon photonics beyond the singlemode regime

Optimal Design of a Silicon-on-insulator Nanowire Waveguide for Broadband Wavelength Conversion

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

2Μm Mid-Infrared Silicon-Rich Silicon Nitride/silicon Hybrid Nonlinear Waveguides

$2-\Mu$ M Wavelength Grating Coupler, Bent Waveguide, and Tunable Microring on Silicon Photonic MPW

Probing the loss origins of ultra-smooth $\mathrm{Si_3N_4}$ integrated photonic waveguides