Study on the Characteristics of the Surface Topography of Excimer Laser Processing Al_(2)O_(3) Ceramic

Ying Liu,Wen Shizhu
2005-01-01
Abstract:Based on the application of the microelectromechanical systems (MEMS), the surface of Al_(2)O_(3) ceramic is processed by excimer laser and the characteristics of topography are examined. It is demonstrated that the statistic parameters of surface topography processed by excimer laser have obvious regularity. The arithmetic-mean value R_(a) and the root-mean square value R_(q) change with the processing parameter in the same step and trend, and there are quantitative relation between them. This paper proposes a simplified model for the excimer laser processing surface profile whose results of the analyses and calculation agree basically with experimental data. Furthermore, the studies show that the surfaces processed by excimer laser are considerably flat. Skewness root-mean-square value Z·_(q) changed little with technological parameter. The above characteris-tics depend on the processing principle of excimer laser, quite different from cutting processing.
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