Micro-Topography Measurement for Excimer Laser Processing Surface and Its Data Processing Approaches

刘莹,陈定方,温诗铸
DOI: https://doi.org/10.3321/j.issn:1004-132x.2002.19.024
2002-01-01
Abstract:Under a group of controlled processing parameters, surfaces of Al 2O 3 ceramic and stainless steel are processed by an excimer laser with ultraviolet wave length as λ =248nm,working together with a precise micro-stroke worktable with resolution as 50nm. The designed micro-topography surfaces are obtained. They are measured by Scanning Electronical Microscope (SEM) and surface topography measuring instrument. Further more, the SEM images are transformed to a 3-dimensional surface topography image by a 3-dimensional digital processing approach, which can be realized to carry out the similar function of an expensive Atomic Force Microscope (AFM). Besides, MatLab software is adopted to process the data from surface topography measuring instrument, and to calculate the statistic parameters.
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