The Characteristics of the Surface Topography of Excimer Laser Processed Al2o3 Ceramic

Y Liu,SZ Wen
DOI: https://doi.org/10.3321/j.issn:1003-8728.2005.08.013
2004-01-01
Abstract:Surface of Al2O3 ceramic was processed by an excimer laser and, the characteristics of topography were examined based on the application of the microelectromechanical system(MEMS). It is indicated that the statistic parameters of surface topography processed, by the, excimer laser have oil obvious regularity. Die arithmetic-mean value R,, and the. root-mean square value R-q change with the changing of processing parameters in the same step and trend, and there is a quantitative relation between them. A simplified model is proposed for the excimer laser processing surface profile, whose results of the analysis and calcination agree basically with the experimental data. Furthermore, the surfaces processed, by excimer laser are greatly flat. Skewness root-mean-square value Z(q) changed little with the change of the technological parameters. The above characteristics depend, oil the processing principle of excimer laser, quite different from the cutting processing.
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