Effect of Excimer Laser Processing Parameters on Surface Topography and Its Fuzzy Analyses

李小兵,赵磊,刘文广,刘莹
DOI: https://doi.org/10.3321/j.issn:1003-8728.2004.11.004
2004-01-01
Abstract:Excimer laser texturing was performed on the surfaces of Al 2O 3 ceramic under a group of controlled processing parameters, in order to investigate the laser processing parameters in relationships with the surface topography. The surface micro-topography was measured by a profilometer. The trend and degree of the effect on surface topography parameters by processing parameters, such as amplified volt, laser scanning frequency and laser scanning speed, are analyzed. The analyses show that the surface parameter root-mean-square roughness R q underwent variations the same as amplified volt and laser scanning frequency, but opposite to laser scanning frequency. The results indicate that laser scanning speed has the biggest effect on surface topography parameters, followed by laser scanning frequency and amplified volt. Accordingly, the designed surface topography can be obtained with the proper processing parameters, which is important to modifying surface topography by laser.
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