Abstract:With the advancement of micro/nanotechnology, precise control of the interaction between light and matter at the micro/nanoscale is crucial for successful material processing and surface functionalization. Ultrafast lasers with ultra-short pulses have gained attention due to their high spatial resolution and low thermal damage, enabling extremely smooth and precise machining on various metal surfaces. At the same time, shorter pulse nanosecond lasers, which have a wider application range, strike a balance between achieving high-precision microfabrication and mitigating adverse thermal effects caused by millisecond lasers. By adjusting laser processing parameters, it is possible to create large-scale micro/nanostructures with complex shapes, delicate textures, and special functionalities, applicable in fields such as optics, electronics, and biomedicine. Short/ultrafast pulse laser fabrication technology opens up more possibilities and prospects for the realization of diverse functional micro/nanostructures. This comprehensive review provides an overview of the interaction mechanisms between short/ultra-short-pulse laser micro/nanoprocessing and materials. By integrating theoretical models such as the two-temperature model and the Drude–Lorentz model, along with comprehensive numerical simulation methods, a brief summary of the ablation behavior of metal surfaces under short/ultra-short-pulse lasers is provided. Furthermore, we delve into the controllability of microstructures, laser-induced periodic surface structures at the nanoscale, and other types of nanostructures under different processing conditions. Thorough analysis and discussion are conducted from multiple perspectives, including surface topography and functional impacts. Subsequently, the focus shifts to the functionalization of metal surfaces with micro/nanostructures, and an in-depth investigation and review are conducted in areas such as surface wettability, bio-inspired surfaces, optical diffraction, and advanced biomedicine. Finally, the advantages and limitations of laser texturing processing techniques are discussed, and the future development of functionalized metal surfaces is anticipated.

Towards obtaining high-quality surfaces with nanometric finish by femtosecond laser ablation: A case study on coppers

Nanoscale-Precision Removal of Copper in Integrated Circuits Based on a Hybrid Process of Plasma Oxidation and Femtosecond Laser Ablation

Study on Laser-Controlled Surface Preparation and Condensation Heat Transfer Characteristics of Copper-Based Micro-Nano Structure Surface

Numerical simulation and experimental study of femtosecond laser ablation of copper: A two-temperature model with temperature-dependent properties and multiple phase transitions

Multiphysics modeling of femtosecond laser-copper interaction: from electron dynamics to plasma eruption

Achieving of Bionic Super-Hydrophobicity by Electrodepositing Nano-Ni-pyramids on the Picosecond Laser-Ablated Micro-Cu-cone Surface

Femtosecond Laser-Induced Evolution of Surface Micro-Structure in Depth Direction of Nickel-Based Alloy

Tuning the Optical Reflection Property of Metal Surfaces Via Micro–nano Particle Structures Fabricated by Ultrafast Laser

Optimization of Laser Remelting Process for Copper Surface Quality

Temporal-Spatial Measurement of Surface Morphological Evolution Time in Nanosecond Laser Irradiation on the Copper Film

Ablation depth enhancement on a copper surface using a dual-color double-pulse femtosecond laser

Metal surface structuring with spatiotemporally focused femtosecond laser pulses

Angle-Independent Colorization of Copper Surfaces by Simultaneous Generation of Picosecond-Laser-Induced Nanostructures and Redeposited Nanoparticles

Nanostructuring of laser textured surface to achieve superhydrophobicity on engineering metal surface

Theoretical and Experimental Study of Energy Transportation and Accumulation in Femtosecond Laser Ablation on Metals

Surface modeling and component analysis of picosecond laser ablation of CVD diamond

Micro/Nano Periodic Surface Structures and Performance of Stainless Steel Machined Using Femtosecond Lasers

Investigation on the ablation behavior of cemented tungsten carbide by a nanosecond UV laser

Micro/nanoengineering of functionalized metal surfaces based on short/ultra-short-pulsed lasers: a review

Formation of Micro-Nano Structure by Laser Deposition and Dealloying of Copper Alloy Layer on Macro-Component Surface

Nanostructural features in nanoporous copper coatings fabricated by laser deposition