The impact of various factors on the surface of X-cut lithium niobate and properties of proton-exchanged waveguides
A. V. Sosunov,I. V. Petukhov,V. I. Kichigin,R. S. Ponomarev,A. A. Mololkin,M. Kuneva
DOI: https://doi.org/10.1080/00150193.2024.2305096
2024-10-16
Ferroelectrics
Abstract:This work describes the effects of various impacts (thermal, plasma, chemical) on X-cut lithium niobate surface and on the structure and optical characteristics of proton-exchanged waveguides. Pre-annealing at 500 °C improved the structural homogeneity of congruent lithium niobate and thus enabled fabricating waveguides of a higher quality. Ar-plasma pretreatment damaged crystal surface and increased lattice deformations. Chemical treatment influenced the surface composition of lithium niobate and the refractive index in annealed proton exchange waveguides. The results provide better understanding of the role of crystal surface in the fabrication of diffusion waveguides and photonic integrated circuits.
materials science, multidisciplinary,physics, condensed matter