Abstract:Lithium niobate (LN) is used in diverse applications such as spectroscopy, remote sensing, and quantum communications. The emergence of lithium-niobate-on-insulator (LNOI) technology and its commercial accessibility represent significant milestones. This technology aids in harnessing the full potential of LN's properties, such as achieving tight mode confinement and strong overlap with applied electric fields, which has enabled LNOI-based electro-optic modulators to have ultra-broad bandwidths with low-voltage operation and low power consumption. Consequently, LNOI devices are emerging as competitive contenders in the integrated photonics landscape. However, the nanofabrication, particularly LN etching, presents a notable challenge. LN is hard, dense, and chemically inert. It has anisotropic etch behavior and a propensity to produce material redeposition during the reactive-ion plasma etch process. These factors make fabricating low-loss LNOI waveguides (WGs) challenging. Recognizing the pivotal role of addressing these fabrication challenges for obtaining low-loss WGs, our research focuses on a systematic study of various process steps in fabricating LNOI WGs and other photonic structures. In particular, our study involves (i) careful selection of hard mask materials, (ii) optimization of inductively coupled plasma etch parameters, and finally, (iii) determining the optimal post-etch cleaning approach to remove redeposited material on the sidewalls of the etched photonic structures. Using the recipe established, we realized optical WGs with total (propagation and coupling) loss value of -10.5 dB, comparable to established values found in the literature. Our findings broaden our understanding of optimizing fabrication processes for low-loss lithium-niobate waveguides and can serve as an accessible resource in advancing LNOI technology.

Fabrication and Characterization of Ion-Exchanged Optical Waveguides in Potassium Lithium Niobate Crystal Substrates

Optical Waveguide Based on Glass by Technology of K+-Na+ and Ag+-Na+ Two-step Ion-exchange

Lithium–Niobate Channel Waveguide for the Realization of Long-Period Gratings

Modeling of Ion-Exchanged Glass Waveguides

Fabrication Techniques of Ion-Exchanged-glass-based Waveguides and Related Integrated Optics Components

Fabrication of Waveguide with Ferroelectric-Domain Structure on Electro-Optical Crystal Slice

Optical Characterization and Stability Study of LiNbO3 Optical Waveguides Fabricated by Buffered Acid

Properties of Ion Exchanged Planar and Channel Optical Waveguides Fabricated in Cu Doped KTiOPO4 Substrates

Two Layers of Buried Optical Waveguides in Glass Substrate by Ion Exchange

New channel guiding structures via femtosecond laser direct writing z-cut LiNbO 3 crystals

A Low propagation loss planar waveguide structure fabricated on lithium niobate via low fluence argon-ion irradiation

Phase Composition of HiVac-VPE Lithium Niobate Optical Waveguides Identified by Spectroscopic Investigations

Optical and structural characterization of annealed proton exchange waveguides in Y-cut MgO:LiNbO3

Structural optimization of femtosecond-laser-written lithium niobate waveguide by Raman spectroscopy

Recent development of ion-exchanged glass waveguide technology

Mg-Ion Indiffusion of Lithium-Niobate Single-Crystal Fiber

Electrically Generated Optical Waveguide in a Lithium-Niobate Thin Film.

Optimization of waveguide fabrication processes in lithium-niobate-on-insulator platform

Lithium niobate ridge waveguides by nickel diffusion and proton-exchanged wet etching

Planar Optical Waveguides In Knbo3 Formed By Mev B And He Ion Implantation

Laser inscribed waveguide optical isolators in iron-doped lithium niobate