Abstract:Lithium niobate (LN) is used in diverse applications such as spectroscopy, remote sensing, and quantum communications. The emergence of lithium-niobate-on-insulator (LNOI) technology and its commercial accessibility represent significant milestones. This technology aids in harnessing the full potential of LN's properties, such as achieving tight mode confinement and strong overlap with applied electric fields, which has enabled LNOI-based electro-optic modulators to have ultra-broad bandwidths with low-voltage operation and low power consumption. Consequently, LNOI devices are emerging as competitive contenders in the integrated photonics landscape. However, the nanofabrication, particularly LN etching, presents a notable challenge. LN is hard, dense, and chemically inert. It has anisotropic etch behavior and a propensity to produce material redeposition during the reactive-ion plasma etch process. These factors make fabricating low-loss LNOI waveguides (WGs) challenging. Recognizing the pivotal role of addressing these fabrication challenges for obtaining low-loss WGs, our research focuses on a systematic study of various process steps in fabricating LNOI WGs and other photonic structures. In particular, our study involves (i) careful selection of hard mask materials, (ii) optimization of inductively coupled plasma etch parameters, and finally, (iii) determining the optimal post-etch cleaning approach to remove redeposited material on the sidewalls of the etched photonic structures. Using the recipe established, we realized optical WGs with total (propagation and coupling) loss value of -10.5 dB, comparable to established values found in the literature. Our findings broaden our understanding of optimizing fabrication processes for low-loss lithium-niobate waveguides and can serve as an accessible resource in advancing LNOI technology.

Structural optimization of femtosecond-laser-written lithium niobate waveguide by Raman spectroscopy

Optical loss measurements in femtosecond laser written waveguides in glass

Compact 1 X 3 Waveguide Beam Splitters with Variable Splitting Ratios in LiNbO3 Crystal Fabricated by Femtosecond Laser Direct Writing

New channel guiding structures via femtosecond laser direct writing z-cut LiNbO 3 crystals

Optimisation of microstructured waveguides in z-cut LiNbO3 crystals

High-precision measurement of a propagation loss of low-loss single-mode optical waveguides on lithium niobate on insulator

Optimization of waveguide fabrication processes in lithium-niobate-on-insulator platform

Nonlinear waveguides by femtosecond laser writing of lithium triborate crystals

3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness

Fabrication of Polarization-Independent Single-Mode Waveguides in Lithium Niobate Crystal with Femtosecond Laser Pulses

Low-loss Lithium Niobate on Insulator (LNOI) Waveguides of a 10 cm-length and a Sub-nanometer Surface Roughness

Femtosecond-laser-written Microstructured Waveguides in BK7 Glass

Efficient light coupling between an ultra-low loss lithium niobate waveguide and an adiabatically tapered single mode optical fiber

Femtosecond Laser Writing of Depressed Cladding Waveguide and Its Applications

Realization of lithium niobate single crystal fiber cladding and its optical characteristics

Low-repetition rate femtosecond laser writing of optical waveguides in KTP crystals: analysis of anisotropic refractive index changes

Low-loss waveguides on Y-cut thin film lithium niobate: towards acousto-optic applications

Characterization and Optimal Design of Silicon-Rich Nitride Nonlinear Waveguides for 2 Μm Wavelength Band

Lithium niobate ridged waveguides with smooth vertical sidewalls fabricated by an ultra-precision cutting method

High-precision measurement of a propagation loss of single-mode optical waveguides on lithium niobate on insulator