Abstract:Lithium niobate (LN) is used in diverse applications such as spectroscopy, remote sensing, and quantum communications. The emergence of lithium-niobate-on-insulator (LNOI) technology and its commercial accessibility represent significant milestones. This technology aids in harnessing the full potential of LN's properties, such as achieving tight mode confinement and strong overlap with applied electric fields, which has enabled LNOI-based electro-optic modulators to have ultra-broad bandwidths with low-voltage operation and low power consumption. Consequently, LNOI devices are emerging as competitive contenders in the integrated photonics landscape. However, the nanofabrication, particularly LN etching, presents a notable challenge. LN is hard, dense, and chemically inert. It has anisotropic etch behavior and a propensity to produce material redeposition during the reactive-ion plasma etch process. These factors make fabricating low-loss LNOI waveguides (WGs) challenging. Recognizing the pivotal role of addressing these fabrication challenges for obtaining low-loss WGs, our research focuses on a systematic study of various process steps in fabricating LNOI WGs and other photonic structures. In particular, our study involves (i) careful selection of hard mask materials, (ii) optimization of inductively coupled plasma etch parameters, and finally, (iii) determining the optimal post-etch cleaning approach to remove redeposited material on the sidewalls of the etched photonic structures. Using the recipe established, we realized optical WGs with total (propagation and coupling) loss value of -10.5 dB, comparable to established values found in the literature. Our findings broaden our understanding of optimizing fabrication processes for low-loss lithium-niobate waveguides and can serve as an accessible resource in advancing LNOI technology.

Optimisation of microstructured waveguides in z-cut LiNbO3 crystals

Compact 1 X 3 Waveguide Beam Splitters with Variable Splitting Ratios in LiNbO3 Crystal Fabricated by Femtosecond Laser Direct Writing

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

New channel guiding structures via femtosecond laser direct writing z-cut LiNbO 3 crystals

Structural optimization of femtosecond-laser-written lithium niobate waveguide by Raman spectroscopy

Fabrication of Polarization-Independent Waveguides Deeply Buried in Lithium Niobate Crystal Using Aberration-Corrected Femtosecond Laser Direct Writing

3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Fabrication of polarization-independent waveguides deeply buried in crystal using aberration-corrected femtosecond laser direct writing

Nonlinear waveguides by femtosecond laser writing of lithium triborate crystals

Mid-infrared Nonlinear Silicon Hybrid Waveguide with High Figure of Merit

High-power Continuous-Wave Optical Waveguiding in a Silica Micro/nanofibre.

Lithium–Niobate Channel Waveguide for the Realization of Long-Period Gratings

Optimization of waveguide fabrication processes in lithium-niobate-on-insulator platform

Fabrication of Polarization-Independent Single-Mode Waveguides in Lithium Niobate Crystal with Femtosecond Laser Pulses

Fabrication Challenges and Performance Optimization of Inclined 2D Lithium Niobate PhC Waveguides

Lithium niobate ridged waveguides with smooth vertical sidewalls fabricated by an ultra-precision cutting method

Three-dimensional Numerical Simulation on the Directly Written Waveguide Formation with 320 Nm UV Laser in Lithium Niobate

Low-repetition rate femtosecond laser writing of optical waveguides in KTP crystals: analysis of anisotropic refractive index changes

Femtosecond laser direct writing quasi-phase matched type-II waveguide in lithium niobate

3D polarization-dependent waveguide arrays in LiNbO3 crystal produced by femtosecond laser writing

Scalable, fiber-compatible lithium-niobate-on-insulator micro-waveguides for efficient nonlinear photonics