Abstract:Optical waveguides fabricated in single crystals offer crucial passive/active optical components for photonic integrated circuits. Single crystals possess inherent advantages over their amorphous counterpart, such as lower optical losses in visible‐to‐mid‐infrared band, larger peak emission cross‐section, higher doping concentration. However, the writing of Type‐I positive refractive index modified waveguides in single crystals using femtosecond laser technology presents significant challenges. Herein, we introduce a novel femtosecond laser direct writing technique that combines slit‐shaping with an immersion oil objective to fabricate low‐loss Type‐I waveguides in single crystals. This approach allows for precise control of waveguide shape, size, mode‐field and refractive index distribution, with a spatial resolution as high as 700 nm and a high positive refractive index variation on the order of 10−2, introducing new degrees of freedom to design and fabricate passive/active optical waveguide devices. As a proof‐of‐concept, we successfully produced a 7 mm‐long circular‐shaped gain waveguide (∼10 μm in diameter) in an Er3+‐doped YAG single crystal, exhibiting a propagation loss as low as 0.23 dB/cm, a net gain of ∼3 dB and a polarization‐insensitive character. The newly‐developed technique is theoretically applicable to arbitrary single crystals, holding promising potential for various applications in integrated optics, optical communication, and photonic quantum circuits. This article is protected by copyright. All rights reserved

Femtosecond laser direct writing quasi-phase matched type-II waveguide in lithium niobate

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Strong Nonlinear Optics In On-Chip Lithium Niobate Photonic Molecules Fabricated By Femtosecond Laser

Fabrication of High-Q Crystalline Microresonators by Femtosecond Laser Direct Writing for Phase Matched Second Harmonic Generation

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Compact 1 X 3 Waveguide Beam Splitters with Variable Splitting Ratios in LiNbO3 Crystal Fabricated by Femtosecond Laser Direct Writing

Nonlinear waveguides by femtosecond laser writing of lithium triborate crystals

New channel guiding structures via femtosecond laser direct writing z-cut LiNbO 3 crystals

Lithium–Niobate Channel Waveguide for the Realization of Long-Period Gratings

Fabrication of Polarization-Independent Waveguides Deeply Buried in Lithium Niobate Crystal Using Aberration-Corrected Femtosecond Laser Direct Writing

Fabrication of Polarization-Independent Single-Mode Waveguides in Lithium Niobate Crystal with Femtosecond Laser Pulses

Fabrication of polarization-independent waveguides deeply buried in crystal using aberration-corrected femtosecond laser direct writing

High-performance femtosecond-laser microfabricated lattice-like-cladding waveguides in Er 3+ and MgO co-doped LiNbO 3 crystals for multi-wavelength guidance and luminescence

Multi-watt, broadband second-harmonic-generation in MgO:PPSLT waveguides fabricated with femtosecond laser micromachining

3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Optimisation of microstructured waveguides in z-cut LiNbO3 crystals

3D polarization-dependent waveguide arrays in LiNbO3 crystal produced by femtosecond laser writing

Transverse writing of three-dimensional tubular optical waveguides in glass with a slit-shaped femtosecond laser beam

Integrated Lithium Niobate Microring Resonators Fabricated With 515 nm Femtosecond Laser Ablation

Femtosecond laser direct writing device and femtosecond laser direct writing method for annular waveguide in transparent materials