Design and Analysis of Vacuum Calibration Apparatus at Cryogenic Temperature

Sha Sha Wu,Zhen Ouyang,Lei Shi,Qiangqiang Meng,Xin Ai,Xuheng Chen,Dazhi Kuang,Ping Ding,junjie Li
DOI: https://doi.org/10.1007/978-981-99-6128-3_51
2023-01-01
Abstract:A vacuum calibration apparatus is presented which allows the calibration of vacuum in cryogenic temperature (down to ~ 4K) with instrumentation at room temperature. The GM cryocooler was used as the cold source, and the temperature uniformity of the calibration chamber was analyzed and optimized. A structure called Sniffer tube was used to keep the temperature of the measuring pipe above 100K in order to avoid the influence of gas condensation on the measuring pipe, and the influence of the cryosorption on the measuring pipe was analyzed. A method to calculate the vacuum of the calibration chamber is presented when the capacitance diaphragm gauge and hot cathode ionization gauge are used as standard gauges. The results show that the temperature difference between arbitrary points across the calibration chamber is less than 0.25K, and the cryopumping effects of the measuring pipe can be avoid by calibrating different gases, which meets the calibration requirements.
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