A compound and portable vacuum gauge calibration apparatus

LU Yao-wen,CHEN Xu,LI De-tian,QI Jing,CHA Liang-zhen
DOI: https://doi.org/10.3969/j.issn.1002-0322.2013.03.001
IF: 4
2013-01-01
Vacuum
Abstract:A compound and portable vacuum calibration apparatus has been developed depending on the existing device.The wide calibration range of vacuum degree can be achieved by three methods integrated on one apparatus,which are static comparison method,static expansion method and dynamic throughput method.There is only one capacitance diaphragm gauge(CDG) with full range of 1.33×105Pa used as reference standard.The experimental results proved that the calibration range is 105Pa~10-5Pa,and the combined standard uncertainty is 1.3%~2.5%.Besides,the size of this apparatus is 450mm×400mm×750mm,and its total weight is less than 35kg.So the weight and cost of it are reduced compared with the existing device,and this apparatus is more suitable for on-site vacuum gauge calibration in many application fields.
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