Novel Type of Portable Vacuum Leak Calibrator Apparatus

卢耀文,陈旭,李得天,刘波,齐京,查良镇

DOI: https://doi.org/10.3969/j.issn.1672-7126.2013.12.03

2013-01-01

Abstract:A novel type of portable vacuum leak calibration apparatus, with advantages inclu ding small size, light weight, and low cost, was developed to meet the calibration demands of on-site leak detection. The calibration apparatus is capable of effec tively calibrating vacuum leak because its standard-flow systemprovides an adju stable known gas flow, and its mass spectrometer measures the helium partial pres sure of the standard flow or leakage as a comparator. The standard-flow system c overs a wide range of standard gas flow, because its orifice, 1 μm in diameter, su pplies the standard pressure, with molecular conductance around 10-10 m3/s, which is precisely adjusted in Direction Measurement and Reducing Pressure meh ods. In addition, only one capacitance diaphragm gauge, with full range of 1.33× 10 4 Pa, serves as the pressure reference standard. The prototyped calibration appa ratus, weighing 35 kg with a size of 400 mm× 300 mm × 400 mm, was tested. The test r esults show that the calibration range reaches 3.5 × 10-6~4.6 × 10-11 Pa · m3/s, and the combined standard uncertainty is 1.8%~2.0%.