Novel Type of Portable Vacuum Gauge Calibration Apparatus

卢耀文,陈旭,李得天,齐京,查良镇

DOI: https://doi.org/10.3969/j.issn.1672-7126.2013.05.13

2013-01-01

Abstract:A novel type of portable vacuum gauge calibrator, with the technical advantages including small size, light weight, and low cost, was developed to meet the technical demands of the real time calibration in a variety of applications. The newly-developed vacuum gauge calibrator mainly consists of a spherical vacuum chamber, 200mm in diameter, in which two capacitance diagram gauges (CDG) with different ranges were used as the reference standards. Three calibration methods, including the static comparison method, static expansion method, and dynamic throughput method, were integrated in the calibrator to achieve the wide range calibration. The test results show that the calibration range reaches 1×105 Pa~4×10-6 Pa with a standard uncertainty of 1.3%~4.7%. The size and total weight of the calibrator were reduced to 450 mm×400 mm×750 mm, and 40 Kg, respectively.