Preparation and Characterization of Nanocrystalline Thin Films of Al_2O_3 or TiO_2 Doped Scandia Stabilized Zirconia Solid Electrolytes

Yawen Zhang,Hku Joint
2001-01-01
Abstract:Dense,crack free and uniform nanocrystalline (Al 2O 3) 0.10 (Sc 2O 3) 0.08 (ZrO 2) 0.82 and (Sc 2O 3) 0.125 (TiO 2) 0.175 (ZrO 2) 0.70 thin films with thickness of 0.31 μm and 0.36 μm respectively on Si(100) substrate,have been successfully prepared by a Sol\|Gel spin coating method.Cubic nanocrystals can be obtained at relatively low sintering temperature with an average grain size of about 47 nm and 51 nm respectively.The aluminia doped ScSZ thins film are the same dense as the ScSZ thin films.However,there are a small amount of pinholes found in the microstructure of the titania doped ScSZ films.
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