Preparation and Characterization of Sc2O3-stabilized ZrO2 Thin-film Electrolyte

Yao Lei,Ou Gang,Pan Wei
2015-01-01
Rare Metal Materials and Engineering
Abstract:The technique of RF magnetron sputtering has been used to prepare Sc2O3-stabilized ZrO2 thin films. The phase structure, grain size and the morphology of surface and cross-section of the films were characterized by XRD and SEM. The effects of substrate species and deposition temperatures on the conductivity of 10ScSZ thin films have been investigated. The results indicate that 10ScSZ thin films with cubic phase at room temperature have been successfully fabricated. The conductivity of 10ScSZ thin films deposited on the quartz substrate is higher than that on the polycrystalline substrate. As the deposition temperature increases, the conductivity of 10ScSZ thin films deposited on the quartz substrate decreases, which is mainly due to the increased grain size.
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