Preparation and Characterization of Nanocrystalline Thin Films of Al2O3 or TiO2 Doped Scandia Stabilized Zirconia Solid Electrolytes

Yawen ZHANG,Yu YANG,Shu JIN,Shujian Tian,GuoBao LI,Jiangtao Jia,Chunsheng LIAO,Chunhua YAN
DOI: https://doi.org/10.3321/j.issn:0479-8023.2001.02.013
2001-01-01
Abstract:Dense,crack-free and uniform nanocrystalline (Al2O3)0.10(Sc2O3)0.08(ZrO2)0.82and (Sc2O3)0.125(TiO2)0.175(ZrO2)0.70 thin films with thickness of 0.31 μm and 0.36 μm respectively on Si(100) substrate,have been successfully prepared by a Sol\|Gel spin coating method.Cubic nanocrystals can be obtained at relatively low sintering temperature with an average grain size of about 47 nm and 51 nm respectively.The aluminia-doped ScSZ thins film are the same dense as the ScSZ thin films.However,there are a small amount of pinholes found in the microstructure of the titania-doped ScSZ films.
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