SYNTHESIS OF ALIGNED CARBON NANOTUBES ARRAY BY RADIO FREQUENCY PLASMA-ENHANCED HOT FILAMENT CHEMICAL VAPOR DEPOSITION

Choon‐Ming Seah,Siang‐Piao Chai,Abdul Rahman Mohamed
2008-01-01
JOURNAL OF INFRARED AND MILLIMETER WAVES
Abstract:Aligned carbon nanotubes array was synthesized by plasma-enhanced hot filament chemical vapor deposition by using nickel nitrate solution-covered silicon as catalyst substrate.The morphology and structure of the carbon nanotubes array were characterized by scanning electron microscope(SEM) and transmission electron microscope and Raman spectrum analysis.SEM images show that the catalyst particles after heat treated in H2-N2 atmosphere are well-dispersed with even particle size.The carbon nanotubes array prepared by this method is vertically aligned and the carbon nanotubes are bamboo-like multi-walled carbon nanotubes,with the length about 5μm.
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