The Role of the Catalytic Particle in the Growth of Carbon Nanotubes by Plasma Enhanced Chemical Vapor Deposition

C Ducati,I Alexandrou,M Chhowalla,J Robertson,GAJ Amaratunga
DOI: https://doi.org/10.1063/1.1728293
IF: 2.877
2004-01-01
Journal of Applied Physics
Abstract:Vertically aligned carbon nanotubes were synthesized by plasma enhanced chemical vapor deposition using nickel as a metal catalyst. High resolution transmission electron microscopy analysis of the particle found at the tip of the tubes reveals the presence of a metastable carbide Ni3C. Since the carbide is found to decompose upon annealing at 600 °C, we suggest that Ni3C is formed after the growth is stopped due to the rapid cooling of the Ni-C interstitial solid solution. A detailed description of the tip growth mechanism is given, that accounts for the composite structure of the tube walls. The shape and size of the catalytic particle determine the concentration gradient that drives the diffusion of C atoms across and though the metal.
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