Abstract:Most MEMS devices are currently based on silicon because of the available surface machining technology. However, Si has poor mechanical and tribological properties which makes it difficult to produce high performance Si based MEMS devices that could work reliably, particularly in harsh environments; diamond, as a superhard material with high mechanical strength, exceptional chemical inertness, outstanding thermal stability and superior tribological performance, could be an ideal material for MEMS. A key challenge for diamond MEMS is the integration of diamond films with other materials. Conventional CVD thin film deposition methods produce diamond films with large grains, high internal stress, poor intergranular adhesion and very rough surfaces, and are consequently ill-suited for MEMS applications. Diamond-like films offer an alternative, but are deposited using physical vapour deposition methods unsuitable for conformal deposition on high aspect ratio features, and generally they do not exhibit the outstanding mechanical properties of diamond. We describe a new ultrananocrystalline diamond (UNCD) film technology based on a microwave plasma technique using argon plasma chemistries that produce UNCD films with morphological and mechanical properties that are ideally suited for producing reliable MEMS devices. We have developed lithographic techniques for the fabrication of UNCD MEMS components, including cantilevers and multilevel devices, acting as precursors to micro-bearings and gears, making UNCD a promising material for the development of high performance MEMS devices. We also review the mechanical, tribological, electronic transport, chemical and biocompatibility properties of UNCD, which make this an ideal material for reliable, long endurance MEMS device use.

Disclosing the Annihilation Effect of Ion-Implantation Induced Defects in Single-Crystal Diamond by Resonant MEMS

Reducing Intrinsic Energy Dissipation in Diamond-on-diamond Mechanical Resonators Toward One Million Quality Factor

Reducing Energy Dissipation and Surface Effect of Diamond Nanoelectromechanical Resonators by Annealing in Oxygen Ambient

Sensing The Point Defects by Single-Crystal Diamond MEMS Resonators

Oxygen-termination effect on the surface energy dissipation in diamond MEMS

High-order Resonance of Single-Crystal Diamond MEMS with High-Quality Factor at High Temperatures

Electrical readout/characterization of single crystal diamond (SCD) cantilever resonators

Characterization of Single Crystal Diamond Damaged Layer Induced by Ion Implantation and Restored by Varying Annealing Conditions

Batch production of single-crystal diamond bridges and cantilevers for microelectromechanical systems

High quality factor single-crystal diamond mechanical resonators

Precise Characterization of Atomic-Scale Corrosion of Single Crystal Diamond in H2 Plasma Based on MEMS/NEMS

Stress Effect on the Resonance Properties of Single-Crystal Diamond Cantilever Resonators for Microscopy Applications.

Impact Of Doping And Microstructure On Quality Factor Of Cvd Diamond Micromechanical Resonators

Materials Science and Fabrication Processes for A New Mems Technoloey Based on Ultrananocrystalline Diamond Thin Films

Nano-cutting mechanism of ion implantation-modified SiC: reducing subsurface damage expansion and abrasive wear

An Investigation Of Combined Size, Rate And Thermal Effects On The Material Properties Of Single Crystal Diamond

Single Crystal Diamond Cantilever for Micro-Electromechanical Systems

Diamond MEMS: from Classical to Quantum

Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond

Effect of Deep-Defects Excitation on Mechanical Energy Dissipation of Single-Crystal Diamond

Engineering the dissipation of crystalline micromechanical resonators