Sensing The Point Defects by Single-Crystal Diamond MEMS Resonators

Guo Chen,Zilong Zhang,Liwen Sang,Yasuo Koide,Satoshi Koizumi,Zhaohui Huang,Meiyong Liao
2023-01-01
Abstract:Point defects in semiconductors greatly affect the electronic and optical properties. Conventional structural methods such as XRD, TEM, and Raman etc. are difficult to observe the atomic scale point defects. This work demonstrates that the point defects can be detected by MEMS resonators. The annihilation of the ion-implantation induced point defects in the single-crystal diamond cantilevers were disclosed by measuring the quality factor of the resonators. It is revealed that MEMS represents a more sensitive tool for characterizing crystalline quality compared with the conventional structural methods.
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