Abstract:A MoNx coating serves as an effective wear protection layer and is crucial for the investigation of its tribological characteristics at various temperatures. This study examined the tribological characteristics of MoNx coatings that were deposited through high-power pulsed magnetron sputtering (HiPIMS) in an Ar/N2 environment with varying N2 partial pressures. The microstructures and mechanical properties of the coatings were elucidated using scanning electron microscopy, grazing-incidence-angle X-ray diffraction, energy-dispersive spectroscopy, and nanoindentation. The dry friction performances of the coatings at different heating temperatures were studied using a ball-on-disk tribometer. The MoNx coating produced by HiPIMS was composed primarily of fcc−Mo2N and featured a fine, dense column crystal with a maximum hardness of 28.8 GPa. The MoNx coatings exhibited excellent lubrication and wear reduction properties at room temperature (RT). The dry friction performances of the MoNx coatings at elevated temperatures were expected to depend on the growth of the MoO3 tribolayer. At relatively low temperatures (300 °C and 400 °C), the MoO3 tribolayer grew slowly and was not enough to provide good lubrication, causing increases in the dry friction of the coatings. However, the δ−MoN phase formed in the MoNx coating deposited at a high N2 partial pressure could facilitate the formation of MoO3 and thus decreased the friction coefficient at 400 °C. At the relatively high heating temperature of 500 °C, however, the MoO3 tribolayer grew so rapidly that the oxide layer became thick, resulting in an increase in the wear rate. It is believed that tuning the growth rate of MoO3 via optimizing the composition and structure of the MoNx coatings might be a useful way to improve the dry friction at various elevated temperatures.

Deposition and Evaluation of MoNx Films Deposited by Magnetron Sputtering

Structural, Mechanical and Tribological Properties of Mo–S–N Solid Lubricant Films

Evolutions of the Microstructure and Properties of the (CrMoNbTaZr)NX Films Prepared by Reactive Magnetron Sputtering: Effects of Stoichiometry and Crystallinity

Dry Friction Performances of MoNx Coatings Deposited by High−Power Pulsed Magnetron Sputtering

Effect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin films

Investigation of the Mo and MoNx Thin Films for Superconducting Electronics Application

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Structure, Composition and Mechanical Properties of Reactively Sputtered (tivcrtaw)nx High-Entropy Films

Effect of Deposition Pressure on Microstructure and Tribological Behavior of MoS X /mos X -Mo Nanoscale Multi-Layer Films

Microstructure, Mechanical and Tribological Properties of Mo-V-N Films by Reactive Magnetron Sputtering

Preparation and tribological behavior of MoSx/MoSx-Mo nanoscale multilayer films in different environments

Carbon and Nitrogen Co-Doping Self-Assembled Mos2 Multilayer Films

Correlation Between Structure and Hardness of Magnetron Sputtering Deposited CNx Films

Preparation and Characterisation of Carbon Nitride Films Deposited by Pulsed Laser Arc Deposition

Deposition of Nanocrystalline Cnx Thin Films on Co/Ni-Covered Substrate by Nitrogen-Atom-Beam-Assisted Pulsed Laser Ablation