A Novel RRAM Stack with ≪inline-Formula> ≪tex-Math Notation="tex">${\rm TaO}_{x}/{\rm HfO}_{y}$ ≪/tex-Math></inline-formula> Double-Switching-Layer Configuration Showing Low Operation Current Through Complimentary Switching of Back-to-Back Connected Subcells

Yan Tang,Zheng Fang,Xinpeng Wang,B. B. Weng,Zhixian Chen,G. Q. Lo
DOI: https://doi.org/10.1109/led.2014.2314093
IF: 4.8157
2014-01-01
IEEE Electron Device Letters
Abstract:In this letter, a novel and fully CMOS compatible RRAM stack-(TiN-TaO x -Hf-HfO y -TiN) has been demonstrated. By serially connecting two back-to-back subcells, Hf-HfO y -TiN and Hf-TaO x -TiN, the cell exhibits outstanding performances, including low Imax (35 μA), stable I ON (>10 μA), and I OFF (<;1 μA), and over 2 × 10 4 dc cycles. By examining the switching characteristics, we have confirmed the well controlled conduction/filament size during the complementary set/reset processes contributes to the stable and low current operation.
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