Abstract:Benefiting from the 193-nm lithography, we have used one of the MPW platforms to realize narrow tip of width 100 nm with great repeatability and uniformity. Based on the new patterning technique, we optimized the suspended spot size converter (SSC) accordingly and the design result showed coupling loss less than -1 dB given with proper matching oil. We fabricated the device together with other photonic circuits and maintained the tip width around 105 nm across the wafers. First, we tested various matching oils, which are commercial product used for optical package but with unknown refractive index at C band, with one of them the SSC realized the state-of-the-art coupling loss less than -1.3 dB/facet with cleaved singlemode fiber (SMF) for both TE and TM polarization state with a remarkable polarization-dependent loss less than 0.5 dB. Subsequently, we tried customized matching oils, which are not suitable for massive production but with known refractive index, to further confirm the effect of the refractive index of the matching oil. A similar trend with simulation result was verified. We also tested many chips randomly selected from different wafers to check the statistics and uniformity of the device, the measurement result showed variation within 0.4 dB across wafers, which is the best performance to the best of our knowledge realized in the available silicon photonics platforms worldwide. Finally, to test the feasibility of the design for package, we studied the alignment tolerance and conducted a simple packaging using ultraviolet (UV) curing to fix the fiber and the silicon chip. The 1-dB extra loss corresponded to 2-mu m misalignment in cross section, similar to the tolerance between two cleaved SMF and the variation after UV curing was just 0.5 dB attributed to the loose alignment tolerance.

A Theoretical Sub-0.1 Db Loss Single Mode Fiber-To-Chip Edge Coupler for Silicon Nitride Waveguides

Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

Low-loss and high stability standard single mode fiber edge couplers for silicon photonics

CMOS-Compatible Ultralow-Loss Three-Step Silicon Edge Coupler with Substrate Substitution in the Whole Communication Band

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

Multilayer Silicon Nitride Based Coupler Integrated into a Silicon Photonics Platform with 0.5 dB Coupling Loss between Standard SMF and the As-Diced Chip Edge Facet

High-efficiency Apodized-Imaging Chip-Fiber Grating Coupler for Silicon Nitride Waveguides

Broad-band Efficient Edge Couplers for Compact Silicon Photonic Circuits

Low Loss, Large Bandwidth Fiber-Chip Edge Couplers Based on Silicon-on-Insulator Platform

Efficient Suspended Coupler with Loss Less Than −1.4 Db Between Si-Photonic Waveguide and Cleaved Single Mode Fiber

Low Loss Chip‐to‐Chip Couplers for High‐Density Co‐Packaged Optics

Ultra‐Low Loss SiN Edge Coupler for III‐V/SiN Hybrid Integration

Broadband and Low-Loss Metamaterial Silicon Nitride Edge Coupler

Library of single-etch silicon nitride grating couplers for low-loss and fabrication-robust fiber-chip interconnection

Broadband and easily fabricated double-tip edge coupler based on thin-film lithium niobate platform

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Efficient Grating Couplers for Optical Fibers to Ultra-Low-loss Waveguides

Ultra-low-loss Inverted Taper Coupler for Silicon-on-insulator Ridge Waveguide

300-Nm-thick, Ultralow-Loss Silicon Nitride Photonic Integrated Circuits by 8-In. Foundry Production