Abstract:Photonic integrated circuits are widely used in applications such as telecommunications and data-centre interconnects 1,2,3,4,5 . However, in optical systems such as microwave synthesizers 6 , optical gyroscopes 7 and atomic clocks 8 , photonic integrated circuits are still considered inferior solutions despite their advantages in size, weight, power consumption and cost. Such high-precision and highly coherent applications favour ultralow-noise laser sources to be integrated with other photonic components in a compact and robustly aligned format—that is, on a single chip—for photonic integrated circuits to replace bulk optics and fibres. There are two major issues preventing the realization of such envisioned photonic integrated circuits: the high phase noise of semiconductor lasers and the difficulty of integrating optical isolators directly on-chip. Here we challenge this convention by leveraging three-dimensional integration that results in ultralow-noise lasers with isolator-free operation for silicon photonics. Through multiple monolithic and heterogeneous processing sequences, direct on-chip integration of III–V gain medium and ultralow-loss silicon nitride waveguides with optical loss around 0.5 decibels per metre are demonstrated. Consequently, the demonstrated photonic integrated circuit enters a regime that gives rise to ultralow-noise lasers and microwave synthesizers without the need for optical isolators, owing to the ultrahigh-quality-factor cavity. Such photonic integrated circuits also offer superior scalability for complex functionalities and volume production, as well as improved stability and reliability over time. The three-dimensional integration on ultralow-loss photonic integrated circuits thus marks a critical step towards complex systems and networks on silicon.

Ultra‐Low Loss SiN Edge Coupler for III‐V/SiN Hybrid Integration

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Broad-band Efficient Edge Couplers for Compact Silicon Photonic Circuits

CMOS-Compatible Ultralow-Loss Three-Step Silicon Edge Coupler with Substrate Substitution in the Whole Communication Band

A simplified laser-to-chip edge coupling scheme using 3D SU-8 taper

Broadband Couplers for Hybrid Silicon-Chalcogenide Glass Photonic Integrated Circuits

300-Nm-thick, Ultralow-Loss Silicon Nitride Photonic Integrated Circuits by 8-In. Foundry Production

High‐Efficiency Fiber‐Chip Edge Coupler for Near‐Ultraviolet Integrated Photonics

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Multilayer Silicon Nitride Based Coupler Integrated into a Silicon Photonics Platform with 0.5 dB Coupling Loss between Standard SMF and the As-Diced Chip Edge Facet

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Low-loss and high stability standard single mode fiber edge couplers for silicon photonics

Novel integration technique for silicon/III-V hybrid laser

High-efficiency edge couplers enabled by vertically tapering on lithium-niobate photonic chips

High-performance lasers for fully integrated silicon nitride photonics

Low-Loss Silica Edge Coupler Based on Cascaded Gratings With Multiple Duty Ratios

Demonstration of a low loss, highly stable and re-useable edge coupler for high heralding efficiency and low g^(2) (0) SOI correlated photon pair sources

Edge Couplers in Silicon Photonic Integrated Circuits: A Review

3D integration enables ultralow-noise isolator-free lasers in silicon photonics