Large-area Vertical Schottky Barrier Diodes Based on 4H-Sic Epilayers: Temperature-dependent Electrical Characteristics

Li Jiang,Wentao Zou,Quanping Zhang,Yuanping Chen,Xiaohong Yan,Yong Wang,Shouyu Wang
DOI: https://doi.org/10.1016/j.nima.2022.167917
2023-01-01
Abstract:As an alternative to conventional silicon-based devices, 4H-phase silicon carbide (4H-SiC) is emerging as a promising semiconductor for particle detectors worked at high temperatures. In this work, 4H-SiC Schottky diodes with a vertical geometry and a sensitive area of 7 x 7 mm2 were fabricated. The electrical characterization parameters of devices were calculated from 300 to 473 K using I-V and Cheung's function H(J)-J, in order to reveal the temperature-dependent performances. The results indicate that the ideality factor (n), barrier height (0b), and leakage current are positively related to temperature. On the contrary, the on-resistance (R0,,), series resistance (Rs), and built-in potential voltage (Vbi) are negatively dependent on temperature. In addition, these diodes with large areas exhibit a quite low leakage current and quite large rectification ratio simultaneously, demonstrating the high quality of these devices. Finally, the response characteristics of a Ni/4H-SiC detector were investigated under the irradiation of a241Am alpha source. This work may provide a further understanding of the SiC-based detectors with large sizes for radiation detection applications at high temperature.
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