Experimental Demonstration of an Integrated Bidirectional Gate ESD Protection Structure for P-Gan Power HEMTs

Yajie Xin,Wanjun Chen,Ruize Sun,Fangzhou Wang,Chao Liu,Xiaochuan Deng,Zhaoji Li,Bo Zhang
DOI: https://doi.org/10.1109/led.2022.3227321
IF: 4.8157
2022-01-01
IEEE Electron Device Letters
Abstract:This letter experimentally demonstrates an integrated bidirectional protection structure to improve the p-GaN power HEMTs’ gate ESD reliability. The protection structure comprises an event-triggering p-GaN HEMT, a low-side resistor ${R}_{\text {L}}$ , and a high-side resistor ${R}_{\text {H}}$ . The critical parameters such as transmission line pulsing (TLP) failure current, trigger voltage ${V}_{\text {Trig}}$ and leakage current ${I}_{\text {leak}}$ are evaluated by TLP testing. It is validated that this protection structure can sustain a forward TLP failure current up to 1.42 A (equivalent human body model passing voltage ${V}_{\text {HBM}} \approx {2.13}$ kV) and a reverse TLP failure current up to 3.06 A ( ${V}_{\text {HBM}} \approx {4.59}$ kV) without sacrificing the protected device’s performance. In addition, it is verified that the TLP failure current can be adjusted by the event-triggering p-GaN HEMT’s active area and ${R}_{\text {H}}/{R}_{\text {L}}$ ratio.
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