Abstract:Microelectronic integration is a key enabler for the ubiquitous deployment of devices in large volumes ranging from MEMS and imaging sensors to consumer electronics. Such integration has also been achieved in photonics, where compact optical transceivers for data centers employ co-integrated photonic and electronic components. Chip-scale integration is of particular interest to coherent laser ranging i.e. frequency modulated continuous wave (FMCW LiDAR), a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range and immunity to interference. Full wafer-scale integration of this technology has been compounded by the stringent requirements on the lasers, requiring high optical coherence, low chirp nonlinearity and requiring optical amplifiers. Here, we overcome this challenge and demonstrate a photonic-electronic integrated circuit-based coherent LiDAR engine, that combined all functionalities using fully foundry-compatible wafer scale manufacturing. It is comprised of a micro-electronic based high voltage arbitrary waveform generator, a hybrid photonic circuit based tunable Vernier laser with piezoelectric actuators, and an erbium-doped waveguide optical amplifier - all realized in a wafer scale manufacturing compatible process that comprises III-V semiconductors, SiN silicon nitride photonic integrated circuits as well as 130nm SiGe BiCMOS technology. The source is a turnkey, linearization-free, and can serve as a 'drop-in' solution in any FMCW LiDAR, that can be seamlessly integrated with an existing focal plane and optical phased array LiDAR approaches, constituting a missing step towards a fully chip-scale integrated LiDAR system.

Lens-Assisted Frequency Modulated Continuous Wave Lidar Based on Integrated Transceiver

A Fully Solid-State Beam Scanner for FMCW LiDAR Application

A 16-Channel Analog CMOS SiPM with On-Chip Front-End for D-ToF LiDAR

Silicon photonic integrated FMCW coherent LIDAR receiving chip

A Hybrid Solid-State Beam Scanner for LiDAR Applications

Photonic-electronic integrated circuit-based coherent LiDAR engine

FMCW LiDAR with a coherent receiver chip based on 3 μm SOI photonics platform

Hitless Two-Dimensional Focal Plane Switch Array Based on MZI-embedded MRRs

A Hybrid Solid-State Beam Scanner for FMCW LiDAR Application.

Optical System for Scanning Angle Amplification in Tunable Laser Based All-Solid Lidar

Novel Semiconductor Lasers and Integrated Photonic Devices

High SNR signal processing system for coherent solid-state LIDAR with silicon photonic balanced photodetector array

Silicon FMCW LiDAR chip integrated with SLG beam scanner and k-clock interferometer for operation with wavelength-swept laser source

Solid-state FMCW LiDAR with in-fiber beam scanner

A Low-Cost High-Resolution Solid-State Lidar With Wavelength Division Multiplexed Components and Interleaved Orthogonal Polarization Grating Couplers

Solid-state Lidar with wide steering angle using counter-propagating beams

Hybrid Integrated Ultralow-Linewidth and Fast-Chirped Laser for FMCW LiDAR

A nanosecond pulsed CMOS LED for all-silicon time-of-flight ranging

Silicon Photonics FMCW LiDAR Chip With a Slow-Light Grating Beam Scanner

Electronic-Photonic Integrated Circuit for 3D Microimaging

Laser Feedback Frequency-Modulated Continuous-Wave LiDAR and 3-D Imaging.