Abstract:Microelectronic integration is a key enabler for the ubiquitous deployment of devices in large volumes ranging from MEMS and imaging sensors to consumer electronics. Such integration has also been achieved in photonics, where compact optical transceivers for data centers employ co-integrated photonic and electronic components. Chip-scale integration is of particular interest to coherent laser ranging i.e. frequency modulated continuous wave (FMCW LiDAR), a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range and immunity to interference. Full wafer-scale integration of this technology has been compounded by the stringent requirements on the lasers, requiring high optical coherence, low chirp nonlinearity and requiring optical amplifiers. Here, we overcome this challenge and demonstrate a photonic-electronic integrated circuit-based coherent LiDAR engine, that combined all functionalities using fully foundry-compatible wafer scale manufacturing. It is comprised of a micro-electronic based high voltage arbitrary waveform generator, a hybrid photonic circuit based tunable Vernier laser with piezoelectric actuators, and an erbium-doped waveguide optical amplifier - all realized in a wafer scale manufacturing compatible process that comprises III-V semiconductors, SiN silicon nitride photonic integrated circuits as well as 130nm SiGe BiCMOS technology. The source is a turnkey, linearization-free, and can serve as a 'drop-in' solution in any FMCW LiDAR, that can be seamlessly integrated with an existing focal plane and optical phased array LiDAR approaches, constituting a missing step towards a fully chip-scale integrated LiDAR system.

Silicon photonic integrated FMCW coherent LIDAR receiving chip

FMCW LiDAR with a coherent receiver chip based on 3 μm SOI photonics platform

A 16-Channel Analog CMOS SiPM with On-Chip Front-End for D-ToF LiDAR

A Fully Solid-State Beam Scanner for FMCW LiDAR Application

High SNR signal processing system for coherent solid-state LIDAR with silicon photonic balanced photodetector array

Fully Integrated FMCW LiDAR Optical Engine on a Single Silicon Chip

Fully Integrated Coherent LiDAR in 3D-Integrated Silicon Photonics/65nm CMOS

Photonic-electronic integrated circuit-based coherent LiDAR engine

Monolithic Coherent LABS Lidar Based on an Integrated Transceiver Array

Silicon FMCW LiDAR chip integrated with SLG beam scanner and k-clock interferometer for operation with wavelength-swept laser source

Silicon Photonics FMCW LiDAR Chip With a Slow-Light Grating Beam Scanner

Monolithic Transceiver for Lens-Assisted Beam-Steering Lidar.

Monolithic FMCW Lidar Chip with Integrated Transceiver Array and Lens-assisted Beam Steering (LABS)

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

A Hybrid Solid-State Beam Scanner for FMCW LiDAR Application.

Fully Integrated Solid-State LiDAR Transmitter on a Multi-Layer Silicon-Nitride-on-Silicon Photonic Platform

Lens-Assisted Frequency Modulated Continuous Wave Lidar Based on Integrated Transceiver

A nanosecond pulsed CMOS LED for all-silicon time-of-flight ranging

Large-Scale Optical Phased Array Based on a Multi-Layer Silicon-Nitride-on-Silicon Photonic Platform

A microcomb-empowered Fourier domain mode-locked LiDAR